| 溅射输运理论中的经典散射截面 |
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| 引用本文： | 张竹林.溅射输运理论中的经典散射截面[J].安徽理工大学学报(自然科学版),2001,21(2):53-56. |
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| 作者姓名： | 张竹林 |
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| 作者单位： | 淮南工业学院数理系, |
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| 基金项目： | 安徽省教育厅自然科学基金的资助! (2 0 0 0 j12 0 8) |
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| 摘 要： | 利用溅射理论中常用的 Lindhard标度相互作用势碰撞散射分析了 Sigmund单幂散射截面与双幂散射截面之间的区别。分析表明 ,对于 Born- Mayer相互作用势碰撞散射 ,双幂截面可以给出比单幂截面好得多的描述。特别对于 Urbassek的 Kr- C相互作用势 ,只有利用双幂截面求解输运方程才能计算出反冲密度函数比较好的近似值
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| 关 键 词： | 溅射 散射截面 碰撞级联 |
| 文章编号： | 1671-0932(2001)02-0053-04 |
| 修稿时间： | 1999年12月23 |
Classical scattering cross section in sputtering transport theory |
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| ZHANG,Zhu,lin.Classical scattering cross section in sputtering transport theory[J].Journal of Anhui University of Science and Technology:Natural Science,2001,21(2):53-56. |
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| Authors: | ZHANG Zhu lin |
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| Abstract: | With Lindhard scaling interaction potential scattering commonly used in sputtering theory, the author analyzed the great difference between Sigmund's single power cross section and the author's double power one. The author's double power cross section can give a much better approximation to the Born Mayer scattering in the low energy region (m~0.1). In particular, for Kr C potential interaction given by Urbassek a few yeas ago, only the author's double power cross sections (m~0.1 ) are used to solve the transport equations can the better approximate results be yielded for the number of recoils. Therefore, it can be asserted that in the low energy collision cascade theory, Sigmund's single power cross section will be replaced by author's double power cross section. |
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| Keywords: | sputtering scattering cross section collision cascade |
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