| 400-1100nm波段用于格兰泰勒棱镜减反射膜的研制 |
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| 引用本文： | 郝殿中,苏富芳,王召兵.400-1100nm波段用于格兰泰勒棱镜减反射膜的研制[J].曲阜师范大学学报,2009,35(1):57-59. |
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| 作者姓名： | 郝殿中 苏富芳 王召兵 |
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| 作者单位： | 曲阜师范大学激光研究所,273165,山东省曲阜市
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| 基金项目： | 山东省教育厅资助项目 |
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| 摘 要： | 为提高格兰泰勒棱镜的透射率和使用带宽，研究了400-1100nm超宽带减反射膜的设计、制备．利用数值优化技术设计了多层膜；采用沉积Al2O3为过渡层的方法，提高了薄膜和晶体的附着力．用电子束沉积和离子束辅助沉积的方法制备了多层减反射膜．采用石英晶体振荡法监控膜厚和沉积速率．测量结果表明平均剩余反射率均小于1．7％．测试薄膜与冰洲石晶体的附着力性能良好．
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| 关 键 词： | 光学薄膜 格兰泰勒棱镜 宽带 减反射膜 离子辅助电子束镀膜 |
Development of 400-1100 nm Antireflection Film Based on Glan-Taylor Prism |
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| HAO Dian-zhong,SU Fu-fang,WANG Zhao-bing.Development of 400-1100 nm Antireflection Film Based on Glan-Taylor Prism[J].Journal of Qufu Normal University(Natural Science),2009,35(1):57-59. |
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| Authors: | HAO Dian-zhong SU Fu-fang WANG Zhao-bing |
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| Institution: | Institute of Laser Research;Qufu Normal University;273165;Qufu;Shandong;PRC |
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| Abstract: | In order to improve performance and increase the transmissivity and bandwidth of the Glan-Taylor prism,super wide bandwidth antireflection films for 400-1100 nm were designed and evaporated on the Glan-Taylor prism.The data refinement method was used to design multilayers.To improve the adhesion between the coating and the crystal,Al2O3 was selected as the transition layer.A multilayer antireflection coating was deposited based on electron beam evaporation and ion assisted deposition.At the same time,coatin... |
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| Keywords: | optical film Glan-Taylor prism wide bandwidth antireflection coatings electron beam evaporation by ion assisted deposition |
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