| 阳极氧化制备铝磁性膜的研究 |
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| 引用本文： | 白新德,邱钦伦,尤引娟.阳极氧化制备铝磁性膜的研究[J].清华大学学报(自然科学版),1996(12). |
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| 作者姓名： | 白新德 邱钦伦 尤引娟 |
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| 作者单位： | 清华大学材料科学与工程系 |
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| 摘 要： | 对用阳极氧化技术制备铝磁性膜进行了实验研究；用扫描电子显微镜、Ｘ射线光电子谱法、卢瑟福背散射谱法等表面分析手段对Ａｌ磁性膜的形貌、大小、厚度以及磁性膜中的元素分布作了分析。实验表明，Ａｌ以Ａｌ２Ｏ３形态存在，Ｃｏ离子主要沉积于铝膜微孔底部。并测量了不同工艺条件下磁性膜的矩形比
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| 关 键 词： | 磁性膜 阳极氧化 垂直磁记录 |
Investigation of anodizing technology for aluminium magnetic films |
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| Bai Xinde,Qiu Qinlun,You Yinjuan.Investigation of anodizing technology for aluminium magnetic films[J].Journal of Tsinghua University(Science and Technology),1996(12). |
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| Authors: | Bai Xinde Qiu Qinlun You Yinjuan |
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| Institution: | Bai Xinde,Qiu Qinlun,You Yinjuan Department of Materials Science and Engineering,Tsinghua University |
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| Abstract: | Anodizing technology for aluminium magnetic films was investigated. The image, size, thickness and the distribution of elements in alunminium magnetic films were analyzed by using scanning electron microscopy (SEM), X ray electron spectroscopy (XPS) and Rutherford backscattering spectroscopy (RBS). It is showed that Al is in the type of Al 2O 3 and Co exists mainly in the bottom of the Al film. Also, the rectangle ratios of the films were measured in this study. |
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