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Electrical properties of sulfur-implanted cubic boron nitride thin films |
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| Authors: | Xingwang Zhang Zhigang Yin Faitong Si Hongli Gao Xin Liu Xiulan Zhang |
| Institution: | 1. Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China |
| Abstract: | Cubic boron nitride Ion implantation -Doping Electrical properties |
| Keywords: | Cubic boron nitride Ion implantation -Doping Electrical properties |
| 本文献已被 CNKI 维普 SpringerLink 等数据库收录！ | |