Studies on Wear and corrosion resistances of carbon nitride thin films on Ti alloy

CNx/SiCN composite films were prepared on titanium ( Ti ) alloy substrates by Radio Frequency Plasma Enhanced Chemical Vapor Deposition ( RF-PECVD ). As a buffer layer, SiCN ensured the adhesion of the CNx thin films on Ti substrates. X-ray diffraction (XRD) measurement revealed that the composite films possessed α-C3N4 structure.The microhardness of the films was 48 to 50 GPa. In order to test the characteristics of wear and corrosion resistances, we prepared Ti alloy samples with and without CNx/SiCN composite films. Also for strengthening the effect of wear and corrosion, the wear tests were carried out under high load (12 MPa) and in 0. 9% NaCl solution. Results of the wear tests and the corrosive electrochemical measurements showed that the samples coated with CNx films had excellent characteristics of wear and corrosion resistances compared with Ti alloy substrate samples.