QK3玻璃基底上可见光区宽带增透膜研究

以QK3为基底设计了一种宽带可见光区增透膜（增透波长0．4-0．8μm），工艺实现采用了电子束蒸发物理气相沉积的方法，薄膜材料仅含有TiO2和SiO2，并分别作为高低折射率材料。利用Edinburgh光谱仪对双面镀制该膜系样品的透过率进行测量，结果表明平均透过率达97．73％。环境测试表明，薄膜具有良好的稳定性和牢固度。该增透膜可以应用于可靠性要求较高的环境中。

Study of Wideband Anti-Reflection Coatings on QK3 Substrate on the Visible Light Spectrum

A type of wideband anti-reflection coatings is designed on QK3 substrate on the visible light spectrum （from 0.4 μm to 0.8μm）. The coatings are fabricated by electron beam physical vapor deposition. Two types of coating materials titanium oxide （TiO2 ） and silicon oxide （SiO2 ）, which are treated as high index and low index material, are used in this process. The Edinburgh spectrometer is used to measure the transmittance of the sample coating the anti-reflection coatings on both side. The test result indicates that the average transmittance is about 97.73%. The weasurement of stability and firmness indicates that the coatings have good performances.