| 一种新型微机电系统共面波导传输线设计与数值分析 |
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| 引用本文： | 蒋振新,丁桂甫,杨春生,张永华,李永海.一种新型微机电系统共面波导传输线设计与数值分析[J].上海交通大学学报,2004,38(Z1):125-128. |
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| 作者姓名： | 蒋振新 丁桂甫 杨春生 张永华 李永海 |
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| 作者单位： | 上海交通大学,薄膜与微细加工技术教育部开放实验室,上海,200030 |
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| 基金项目： | 信息产业部电子科学研究院预研项目(0241308050116)国家自然科学基金资助项目(10377009)微纳米加工技术国家重点实验室基金项目(51485020301) |
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| 摘 要： | 提出了一种基于微机电系统(MEMS)技术的新颖桥式共面波导(BCPW)结构,采用准静态分析方法对其特征阻抗、导体损耗、介质损耗等基本参数进行了理论计算,并与传统共面波导进行了比较分析.结果表明,新设计具有无辐射损耗、宽阻、低损耗、对加工工艺要求低等优点.
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| 关 键 词： | 桥式共面波导 微机电系统 特征阻抗 导体损耗 介质损耗 |
| 文章编号： | 1006-2467(2004)S1-0125-04 |
| 修稿时间： | 2003年11月6日 |
Design and Simulation of a Novel Coplanar Waveguide for Micro-Electromechanical Systems |
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| JIANG Zhen-xin,DIGN Gui-fu,YANG Chun-sheng,ZHANG Yong-hua,LI Yong-haihai Jiaotong Univ.,Shanghai ,China.Design and Simulation of a Novel Coplanar Waveguide for Micro-Electromechanical Systems[J].Journal of Shanghai Jiaotong University,2004,38(Z1):125-128. |
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| Authors: | JIANG Zhen-xin DIGN Gui-fu YANG Chun-sheng ZHANG Yong-hua LI Yong-haihai Jiaotong Univ Shanghai China |
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| Institution: | JIANG Zhen-xin,DIGN Gui-fu,YANG Chun-sheng,ZHANG Yong-hua,LI Yong-haihai Jiaotong Univ.,Shanghai 200030,China) |
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| Abstract: | A new design of bridge coplanar waveguide(BCPW) with the advantages of zero radiation loss, wide impedance ranges and low attenuation was presented. The characteristic impedance, dielectric loss, conductor loss and sensitivity coefficient of this waveguide were simulated and compared with the conventional coplanar waveguide. |
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| Keywords: | bridge coplanar waveguide (BCPW) micro-electromechanical systems characteristic impedance conductor loss dielectric loss |
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