| 大偏转角偏转象差的分析与校正 |
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| 引用本文： | 张晓兵 尹涵春. 大偏转角偏转象差的分析与校正[J]. 东南大学学报(自然科学版), 1996, 26(3): 19-23 |
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| 作者姓名： | 张晓兵 尹涵春 |
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| 作者单位： | 东南大学电子学研究所 |
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| 摘 要： | 应用多极场理论，研究了大偏转角情况下的偏转象差，给出了应用十极场微五级象差校正时的场表达式，计算了在多种情况下十极场对五级象差校正的影响，分析了多极场象差校正的方法。
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| 关 键 词： | 多极场 大偏转角 偏转象差 象差校正 电子偏转 |
Analysis and Correction of the Large Deflection Angle Aberration |
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| Zhang Xiaobing, Yin Hanchun, Zhang Xiong, Tong Linsu. Analysis and Correction of the Large Deflection Angle Aberration[J]. Journal of Southeast University(Natural Science Edition), 1996, 26(3): 19-23 |
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| Authors: | Zhang Xiaobing Yin Hanchun Zhang Xiong Tong Linsu |
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| Abstract: | he multipole field theory to research the deflection aberration at the large deflection angle is used. The expression of multipole field is developed which could be applied to the correction of fifth-order aberration by using the ten-poles field. The influence of ten-poles field on fifthorder aberration is computed. The analysis method of the aberration correcting by using multipole field effect is also researched. |
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| Keywords: | multipole field aberration/large deflection angle. |
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