| 纳米三坐标测量机的导轨直线度误差分离实验 |
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| 引用本文： | 李启标,陈晓怀.纳米三坐标测量机的导轨直线度误差分离实验[J].黑龙江科技学院学报,2008,18(4). |
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| 作者姓名： | 李启标 陈晓怀 |
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| 作者单位： | 合肥工业大学,仪器科学与光电工程学院,合肥,230009 |
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| 摘 要： | 基于误差分离技术,以德国SIOS公司的微型纳米级精度的三光束激光干涉仪SP2000为高精度的标准量,对正在研制的新型纳米三坐标测量机进行导轨直线度误差分离方案的研究.设计出具体的误差分离实验装置,并给出详细的实验操作过程.通过三次样条插值拟合,对实验测得的误差值进行修正.实验结果证明了所采用的误差分离方法明显提高了纳米三坐标测量机的精度.
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| 关 键 词： | 纳米三坐标测量机 直线度误差 误差分离实验 |
Straightness error separation experimental of Nano coordinate measuring machine |
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| LI Qibiao,CHEN Xiaohuai.Straightness error separation experimental of Nano coordinate measuring machine[J].Journal of Heilongjiang Institute of Science and Technology,2008,18(4). |
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| Authors: | LI Qibiao CHEN Xiaohuai |
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| Institution: | LI Qibiao,CHEN Xiaohuai(College of Instrument Science , Opto-electronic Engineering,Hefei University of Technology,Hefei 230009,China) |
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| Abstract: | This paper mainly introduces the study on high accuracy error separation methods.Based on error separation techniques,the paper highlights the use of the miniature three-beam laser interferometer with nanometer order accuracy SP 2000 of the SIOS Corporation of Germany investigate the Straightness error separation methods of the being-developed new type Nano-CMM,offers the design of a specific error separation experimental device,and gives details of the experimental operation of the process.The correction o... |
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| Keywords: | Nano-CMM straightness error error separation experimental |
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