| H2/CH4/H2S/Ar气氛合成n型金刚石薄膜过程中硫分布的数值模拟 |
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| 引用本文： | 南景宇,赵庆勋,乔晓东,闫正,刘保亭,张靖.H2/CH4/H2S/Ar气氛合成n型金刚石薄膜过程中硫分布的数值模拟[J].河北大学学报(自然科学版),2005,25(4):369-372. |
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| 作者姓名： | 南景宇 赵庆勋 乔晓东 闫正 刘保亭 张靖 |
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| 作者单位： | 1.河北大学,物理科学与技术学院,河北,保定,071002;河北北方学院,物理系,河北,张家口,075028； 2.河北大学,物理科学与技术学院,河北,保定,071002 |
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| 基金项目： | 河北省自然科学基金资助项目(503130) |
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| 摘 要： | 本工作采用Monte Carlo方法,根据辉光放电理论,对以H2S为掺杂源气体采用EACVD技术合成n型硫掺杂的金刚石薄膜的动力学过程进行了模拟.得出不同气压、偏压情况下n型硫掺杂的金刚石薄膜的动力学过程中掺杂元素S和S+粒子数分布,计算结果对掺杂过程的研究具有参考价值.
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| 关 键 词： | Monte Carlo 方法 金刚石薄膜 n型掺杂 EACVD |
| 文章编号： | 1000-1565(2005)04-0369-04 |
| 修稿时间： | 2005年3月10日 |
Numerical Simulations of Particle Distributions for Sulfur Doped n-type Diamond Thin Film in the Mixture of H2/CH4/H2S/Ar |
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| NAN Jing-yu,ZHAO Qing-xun,QIAO Xiao-dong,YAN Zheng,LIU Bao-ting,ZHANG Jing.Numerical Simulations of Particle Distributions for Sulfur Doped n-type Diamond Thin Film in the Mixture of H2/CH4/H2S/Ar[J].Journal of Hebei University (Natural Science Edition),2005,25(4):369-372. |
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| Authors: | NAN Jing-yu ZHAO Qing-xun QIAO Xiao-dong YAN Zheng LIU Bao-ting ZHANG Jing |
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| Institution: | NAN Jing-yu~ |
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| Abstract: | Monte Carlo simulations are adopted to study the dynamic process of n-type diamond film doped in the gas of H_2S based on the theory of glow discharge in electron-assisted chemical vapor deposition (EACVD) system. The dynamic process of n-type dope diamond film is simulated under different gas pressure and bias voltage. The particle distributions of S and S~+ have been obtained. The result is very important for investigation of n-type diamond film doping at low temperature. |
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| Keywords: | Monte Carlo simulation Diamond film n-type doping EACVD |
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