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激光烧蚀速率精密调节的新技术
引用本文:潘大任 卢玉村. 激光烧蚀速率精密调节的新技术[J]. 四川大学学报(自然科学版), 1989, 26(1): 54-57
作者姓名:潘大任 卢玉村
摘    要:提出了一种精密调节激光烧蚀速率的方法——双光束技术,得到了比单光束技术约高两个数量级的调节精度。对这种双光束调节的机制进行了解释。

关 键 词:激光烧蚀 精密调节 双光束 激光仪

A NEW TECHNIQUE FOR FINE ADJUSTMENT OF LASER-ABLATION RATE
Pan Daren Lu Yucun Chen Jianguo Li Dayi. A NEW TECHNIQUE FOR FINE ADJUSTMENT OF LASER-ABLATION RATE[J]. Journal of Sichuan University (Natural Science Edition), 1989, 26(1): 54-57
Authors:Pan Daren Lu Yucun Chen Jianguo Li Dayi
Affiliation:Pan Daren Lu Yucun Chen Jianguo Li Dayi
Abstract:A two-beam technique has been presented as a new method to adjust laser-ablation rate. An adjust accuracy of about two orders of magnitude higher than that in usual one-beam technique was obtained. The mechanism of the two-beam adjusting is explained in terms of the calculation result of surface temperature increase in laser heating.
Keywords:laser-ablation rate   line adjustment   two-beam technique   fused SiO2 .
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