| 微机械陀螺测试技术的研究 |
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| 引用本文： | 罗文华,温廷敦.微机械陀螺测试技术的研究[J].太原师范学院学报(自然科学版),2008,7(1):96-98. |
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| 作者姓名： | 罗文华 温廷敦 |
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| 作者单位： | 中北大学,仪器科学与测试技术教育部重点实验室,山西,太原,030051 |
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| 摘 要： | 文章介绍了微机械陀螺的基本原理以及几种不同检测方式的硅微陀螺,包括电容式、压电式、压阻式、隧道式等,分析了这些微陀螺的基本检测原理,总结出它们在检测性能方面存在的一些问题.为了提高微机械陀螺的灵敏度提出用新的微机理介观压阻效应,并对基于介观压阻效应的微陀螺前景进行了论述.
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| 关 键 词： | 微机械陀螺 介观压阻效应 共振隧穿 超晶格 |
Investigation of Test Technology of Micro-machined Gyroscope |
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| Luo Wenhua,Wen Tingdun.Investigation of Test Technology of Micro-machined Gyroscope[J].Journal of Taiyuan Normal University:Natural Science Edition,2008,7(1):96-98. |
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| Authors: | Luo Wenhua Wen Tingdun |
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| Institution: | Luo Wenhua Wen Tingdun(Key Laboratory of Instrumentation Science ＆ Dynamic Measurement of the Ministry Educatio North University of China,Taiyuan 030051,China) |
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| Abstract: | There explains the basic principle of silicon micro-machined gyroscope and several kinds of measure principle,including capacitive type,piezoelectricity type,piezoresistive type,tunneling type.The characteristics of these types are introduced.Some fo cused problems are pointed out,and several methods and advices are offered to improve the property of silicon Micro-machined gyroscope.Furthermore,the principle and application prospect of the meso-piezoresistance which is a new micro-mechanisms also discussed. |
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| Keywords: | micro-machined gyroscope meso-piezoresistance resonant tunneling superlattices |
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