| 氧化物半导体气敏膜片光学特性研究 |
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| 引用本文： | 翁文华,许富江.氧化物半导体气敏膜片光学特性研究[J].华南理工大学学报(自然科学版),1995,23(12):110-114. |
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| 作者姓名： | 翁文华 许富江 |
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| 作者单位： | 华南理工大学应用物理系 |
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| 摘 要： | 为了更深入地研究半导体气敏器件的气敏－光学特性,进一步提高其性能,地导体气敏元件的机理及光波在导电媒质中的传播,本文在实验基础上,建立了氧化物半导体气敏片的光学特性数学模型,导出了光通过膜片时上对透过率与膜片生长的若干主要因素的定量关系。
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| 关 键 词： | 光透射 氧化物半导体 气敏器件 光学特性 |
STUDIES ON THE OPTICAL PROPERTIES OF SEMICONDUCTOR OXIDE GAS SENSING THIN FILMS |
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| Weng Wenhua, Xu Fujiang, Sun Fugang.STUDIES ON THE OPTICAL PROPERTIES OF SEMICONDUCTOR OXIDE GAS SENSING THIN FILMS[J].Journal of South China University of Technology(Natural Science Edition),1995,23(12):110-114. |
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| Authors: | Weng Wenhua Xu Fujiang Sun Fugang |
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| Abstract: | In order to make a throughout study of the "gas sensing-optics" properties of semiconductor gas sensors and make improvements on the quality, according to the mechanism of semiconductor gas sensor and the propagation of light in electric medium, this paper outlines a math model of optical properties of semiconductor oxide gas sensing thin films based on experiments. It also provides the quantitative relations between the relative transmissivity and sereral primary factors of the growth of the film. Test exhibits that the math model of theory coincides well with the results of experiments. |
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| Keywords: | gas sensing optical transmission mathematical ematical model N-semiconductor oxide |
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