| 集成电路工艺实时统计分析方法与应用 |
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| 引用本文： | 何野.集成电路工艺实时统计分析方法与应用[J].应用科学学报,1991,9(2):140-144. |
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| 作者姓名： | 何野 |
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| 作者单位： | 东南大学 |
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| 基金项目： | 国家自然科学基金资助课题 |
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| 摘 要： | 与试验设计方法相结合,提出了一个用于集成电路工艺实时统计分析的方法.对CMOS和NMOS电路的实际模拟分析结果表明,利用该方法对工艺线上的芯片测量结果进行分析,能找出导致器件及电路特性分布异常的主要可能工序.
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| 关 键 词： | 工艺涨落 统计分析 集成电路工艺 |
| 收稿时间： | 1990-02-09 |
A REAL TIME STATISTICAL ANALYSIS METHODOLOGY AND APPLICATION FOR INTEGRATED CIRCUIT PROCESS |
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| He YIE.A REAL TIME STATISTICAL ANALYSIS METHODOLOGY AND APPLICATION FOR INTEGRATED CIRCUIT PROCESS[J].Journal of Applied Sciences,1991,9(2):140-144. |
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| Authors: | He YIE |
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| Institution: | Southeast University |
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| Abstract: | A real time statistical analysis methodology of IC manufacturing process in combination with an experimental design is presented. The modelling analysis results of the real CMOS and NMOS IC indi cate that the most possible process step which is responsible for the unusual device or circuit performance stribution can be found using the methodology to analyze the measurementl diresults obtained from chips in the process line. |
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| Keywords: | integrated circuit process process fluctuation statistica analysis |
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