基于规则的批处理设备调度方法在半导体晶圆制造系统中应用

针对半导体炉管区瓶颈设备的批处理调度问题，提出满足工艺约束和设备限制的组批调度算法.在考虑产品动态到达的基础上，根据半导体制造系统大规模、多重入、混合型生产等特征，针对晶圆平均等待时间进行优化，实现多产品、多机台的实时组合派工.仿真实验在一个虚拟的晶圆制造系统上进行.结果表明，该算法在实时派工中对瓶颈设备填充率和利用率显著提升，有效地缩短了产品加工周期.

Rule-Based Scheduling of Batch Processing Machine Applied to Semiconductor Wafer Fabrication System

To solve the scheduling problem of batch processing machine in the furnace district of semiconductor wafer fabrication system (SWFS), this paper proposed a scheduling algorithm which satisfies the process constraint and equipment limitations. Considering the dynamic arrival of lots and the SWFS’s features of large scale and multiple re-entrant process, the algorithm may realize the real-time combinatory dispatching of multi-product and multi-machine by optimizing average waiting time of lots. The simulation based experiments were executed on a virtual SWFS fab simulation platform, and the result shows that the algorithm can significantly improve the fill rate and the utilization of the bottleneck, thus shorten the cycle time in real time dispatching.