碰撞对伴有二次电子发射等离子体鞘层的影响

建立了包括器壁发射二次电子的等离子体鞘层的流体模型,讨论了一维稳态等离子体鞘层中离子与中性粒子的碰撞对含有二次电子发射的鞘层结构的影响。结果表明:碰撞频率的增加,导致鞘层空间的二次电子密度逐渐增大,离子密度是先增加后减小,离子速度则是先减小后增加。从碰撞和二次电子发射比较来说,碰撞频率的增加对于鞘层空间影响更大。另外发现碰撞对于不同带电量的离子来说,带电量较少的离子的等离子体鞘层受碰撞的影响要大一些。

Effect of collision on plasma sheath with secondary electron emission

In this paper,the fluid model of plasma sheath is developed including ion-neutral collision.The plasma consists of electrons,ions and secondary electrons from the wall.It is discussed that ion-neutral collision affects the sheath structure in steady state of one dimension.There are conclusions that when the frequency of ion-neutral collision increases,the density of secondary electron increases,the density of ions increases first and then decreases,but the velocity of ions is reverse.In contrast with ion-neutral collision and SEE,the effect of the former on the sheath is stronger.In addition,when the charge of the ions is less,ion-neutral collision affect the sheath more strongly.