硅微型梳状线振动驱动式陀螺仪的模型分析

通过硅微型梳状线振动驱动式陀螺仪的结构示意图,介绍了该陀螺仪的工作特点.利用牵连运动的加速度合成定理和牛顿力学定律,通过力学分析和数学演算得到了该陀螺仪的活动质量的加速度表达式,并给出了该陀螺仪的数学模型.在陀螺仪做各坐标轴方向的转动和作一般转动的情况下,对数学模型进行了求解,最后利用方程的解分析了陀螺仪是如何工作的、各种情况下该陀螺仪工作的差别、各坐标轴方向的转动对陀螺仪工作的不同影响.

Analysis on Mathematical Model of Lateral Comb Drive Micromechanical Silicon Gyroscope

By the sketch of structure of lateral comb drive micromechanical silicon gyroscopes,the authors have fully explained the working laws of this kind of gyroscope.In the aid of the composition theorem of acceleration of influence move and Newton's mechanics laws plus strict mechanical analysis and accurate mathematical computations,the authors have acquired the presentation formula of acceleration of the movable mass of the gyroscope.Under the conditions of the three axial direction rotations and general rotat...