微沟槽周期结构表面的磁性复合流体微纳光整研究及实验教学装置应用

针对磁性复合流体黏度可控的特性,研究一种微纳沟槽表面可控抛光加工方法及工艺,实现低成本、可控微纳结构表面加工技术,并将其应用于微纳加工实验教学。采用磁性复合流体作为抛光液,设计端面式和圆周面式两种磁性复合流体抛光机构;根据周期性微米级沟槽表面结构特点,采用圆周面式磁性复合流体抛光机构进行微结构表面抛光加工实验;设计加工工艺,通过实验对比微沟槽周期结构表面加工效果,验证了实验装置及微结构可控抛光加工方法的有效性,实现微沟槽周期结构表面材料可控去除加工。该装置结构紧凑,使用与维护成本低,有效填补面向机械专业制造类课程的微纳加工实验教学装置技术空白。

Polishing of Periodic Structural Surface of Micro Grooves by Magnetic Compound Fluid and Its Application in Experimental Teaching Equipments

Based on the viscosity control of magnetic compound fluid, a method and process for the polishing of micro-nano structural surfaces were presented in order to obtain a micro-nano machining technology with low cost and controllabitity and apply it in the teaching experiment of micro-nano machining. Using the magnetic compound fluid as the polishing fluid, two kinds of magnetic compound fluid polishing equipments were designed. According to the characteristics of the surface structure of micro grooves, the circumferential type magnetic compound fluid polishing equipment was used to perform the microstructure surface finishing experiments. By designing the polishing process and comparing the effect of the surface machining of micro groove fringes, the experimental device and the method for microstructure finishing were validated. The device for magnetic compound fluid polishing has a simple structure, low cost in use and maintenance, which is suitable for widely use in the experimental teaching of micro-nano machining in mechanical manufacturing courses.