Structure,optical, and magnetic properties of Mn-doped ZnO films prepared by sputtering |
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Authors: | Li-wei Wang Zheng Xu Fu-jun Zhang Su-ling Zhao Li-fang Lu |
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Institution: | (1) State Key Lab of Advanced Welding Production Technology, School of Materials Science and Engineering, Harbin Institute of Technology, 150001 Harbin, People’s Republic of China; |
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Abstract: | The microstructural, optical, and magnetic properties and room-temperature photoluminescence (PL) of Mn-doped ZnO thin films
were studied. The chemical compositions were examined by energy dispersive X-ray spectroscopy (EDS) and the charge state of
Mn ions in the ZnO:Mn films was characterized by X-ray photoelectronic spectrometry (XPS). From the X-ray diffraction (XRD)
data of the samples, it can be found that Mn doping does not change the orientation of ZnO thin films. All the films prepared
have a wurtzite structure and grow mainly along the c-axis orientation. The grain size and the residual stress were calculated from the XRD results. The optical transmittance
of the film decreases with the increase of manganese content in ZnO. The room-temperature photoluminescence of the films shows
that the intensity of near band energy (NBE) emission depends strongly on the Mn content. The hysteresis behavior indicates
that the films with the Mn content below 9at% are ferromagnetic at room temperature. |
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Keywords: | |
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