微球CH膜表面光洁度影响因素研究

采用低压等离子体化学气相沉积法(LPPCVD),在塑料微球表面制备了非晶碳氢(α-C:H)薄膜.利用光学显微镜、原子力显微镜（AFM）和扫描电子显微镜(SEM)对薄膜的表面形貌进行了分析.主要研究了芯轴表面形貌、碰撞、反弹盘表面材料、薄膜厚度等四个因素对微球CH涂层表面形貌的影响.结果表明：芯轴表面形貌对CH涂层的表面形貌影响很大,改善芯轴表面形貌可提高涂层表面光洁度;当反弹盘的表面材质不同时,制备出的微球涂层的表面粗糙度有不同程度的差别;碰撞是引起微球CH涂层表面榴状突起的重要原因之一;微球CH涂层

Influencing factors study of surface finish of CH coating on microshell

CH coating of microshell was fabricated by low-pressure plasma chemical vapor deposition (LPPCVD). X-radiography, Atomic force microscopy (AFM) and scanning electronic microscope (SEM) were used to probe the surface topography, which related mainly to the mandrel surface, collision, bounce pan and thickness of coating. The results showed that the surface topography of coating was influenced by the mandrel surface greatly. when the mandrel surface was improved, the surface finish of coating would be improved, too. Using bounce pans with different surface materials, it was found that the roughness of coatings were also different. In addition, the roughness of coating increased with the increasing coating thickness, and collision was one of the causes in the production of isolated domes.