| 国产磨料的杂质及研磨对硅片的污染分析 |
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| 引用本文： | 张德贤,王昌华.国产磨料的杂质及研磨对硅片的污染分析[J].西安交通大学学报,1990,24(6):123-128,58. |
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| 作者姓名： | 张德贤 王昌华 |
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| 作者单位： | 西安交通大学电气工程系，西安交通大学电子工程系，西安交通大学电子工程系 |
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| 摘 要： | 本文研究了国产磨料的成分、杂质和磨料、磨具对硅片的污染,分析了铁对硅器件的危害,提出了减少污染的方法.
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| 关 键 词： | 杂质 研磨 硅 磨料 污染 |
THE IMPURITY OF ABRASIVE MATERIALS MADE IN CHINA AND THE ANALYSIS OF CONTAMINATION OF SILICON PLATE FROM LAPPING |
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| Zhang Dexian.THE IMPURITY OF ABRASIVE MATERIALS MADE IN CHINA AND THE ANALYSIS OF CONTAMINATION OF SILICON PLATE FROM LAPPING[J].Journal of Xi'an Jiaotong University,1990,24(6):123-128,58. |
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| Authors: | Zhang Dexian |
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| Institution: | Zhang Dexian (Departmen3 of Electrical Engineering)Wang Changhua Gong Bin (Department of Electronic Engineering) |
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| Abstract: | The composition and impurity of abrasive materials made in china and the contamination or silicon plate from abrasive materials and abrasive tools are investigated,the damage or iron to silicon devices is analyzed,and ways in reducing the contamination are presented. |
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| Keywords: | silicon abrasive contamination |
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