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流态化CVD制备超细Al_2O_3-SnO_2复合粒子过程模型研究
引用本文:华彬,李春忠,成浩,胡黎明,李洪钟. 流态化CVD制备超细Al_2O_3-SnO_2复合粒子过程模型研究[J]. 华东理工大学学报(自然科学版), 1995, 0(4)
作者姓名:华彬  李春忠  成浩  胡黎明  李洪钟
作者单位:华东理工大学技术化学物理研究所,中国科学院化工冶金研究所
摘    要:基于流态化CVD制备超细复合粒子过程中的反应、成核、包敷、气流夹带,建立了流态化CVD反应器中描述超细粒子的粒度、分布及成核包敷、成膜包敷的一维过程模型。针对SnCl_4-H_2O-N_2体系包敷超细Al_2O_3粒子的过程,研究了反应器中SnO_2粒子的形成过程及操作参数对其在Al_2O_3粒子表面的淀积速率及形态的影响。结果表明,反应温度和SnCl_4浓度升高,包敷速率加快,包敷形态变差;背景气氛粘度增大,包敷形态变优,包敷速率减小;操作气速增大,包敷速率加快,包敷形态变优。

关 键 词:模型;超细粒子;化学气相淀积;包敷

Modelling Study of Al_2O_3-SnO_2 Ultrafine Particle Composite Synthesis Process by Fluidiziation Chemical Vapor Deposition
Hua Bin,Li Chunzhong,Cheng Hao and Hu Liming. Modelling Study of Al_2O_3-SnO_2 Ultrafine Particle Composite Synthesis Process by Fluidiziation Chemical Vapor Deposition[J]. Journal of East China University of Science and Technology, 1995, 0(4)
Authors:Hua Bin  Li Chunzhong  Cheng Hao  Hu Liming
Abstract:Based on the chemical reation,nucleation,coating and gas entraning in the flu-idization chemical vapor deposition reactor,one dimentional process model of particle size,film coating and nucleation coating was established.To the SnCl_4-H_2O-N_2 system,coating rate and morphology of SnO_2 with operating parameters were studied.The results showed that the coating rate increased with increasing reation temperature and SnCl_4 flux,but the coating morphology got worse with the gas viscosity increasing,the coating rate decreased but the coating morphology got better.
Keywords:modelling  ultrafine partcles  chemical vapor deposition  coating  
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