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Soft X-ray optical multilayer mirrors
Authors:Haili Bai  Enyong Jiang  Ping Wu  Zhidong Lou
Institution:(1) Department of Applied Physics, Faculty of Science, Tianjin University, 300072 Tknjin, China
Abstract:The current research on the structure design, characterization and structural stability of soft X-ray optical multilayermirrors is reviewed and further studies on the currently existing problems and the possible solutions are made.
Keywords:soft X-ray multilayers  structure design  structural stability  structure characterization
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