| 高温超导本征结加工中的氩离子铣技术 |
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| 引用本文： | 姜振国,钟扬音,康琳,陈健,袁洁,羽多野毅,王华兵,吴培亨. 高温超导本征结加工中的氩离子铣技术[J]. 科学通报, 2011, 56(21): 1696-1702. DOI: 10.1360/972011-347 |
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| 作者姓名： | 姜振国 钟扬音 康琳 陈健 袁洁 羽多野毅 王华兵 吴培亨 |
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| 作者单位： | 南京大学超导电子学研究所;日本国立材料科学研究所; |
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| 基金项目： | 国家重点基础研究发展计划(2011CBA00107); 高等学校博士点基金(20090091110039); 中央高校基本科研业务费专项资金(1092021006)资助 |
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| 摘 要： | 最近, 用高温超导单晶Bi2Sr2CaCu2O8+x 制备本征结器件从而实现太赫兹辐射源的研究有较大突破, 而本征结器件的样品制作仍需细致而深入的研究. 为此我们首先借助于单晶硅, 制作了矩形的高台(mesa)结构, 观测了在不同离子加速电压和不同离子束入射角度下, 氩离子铣的刻蚀速度和刻蚀形成台阶侧壁的形貌, 给出了一种刻蚀速率高、台阶侧壁陡峭、对样品损伤小的刻蚀方案, 用此方法加工出的高温超导本征结器件在一定条件下可以得到太赫兹辐射信号.
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| 关 键 词： | 氩离子铣 高温超导本征结 太赫兹辐射 |
| 收稿时间： | 2011-03-02 |
Influence of argon ion milling in the fabrication of high temperature superconducting intrinsic Josephson junctions |
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| JIANG ZhenGuo,ZHONG YangYin,KANG Lin,CHEN Jian,YUAN Jie,HATANO Takeshi,WANG HuaBing , WU PeiHeng Research Institute of Superconductor Electronics,Nanjing University,Nanjing ,China, National Institute for Materials Science,Tsukuba ,Japan. Influence of argon ion milling in the fabrication of high temperature superconducting intrinsic Josephson junctions[J]. Chinese Science Bulletin, 2011, 56(21): 1696-1702. DOI: 10.1360/972011-347 |
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| Authors: | JIANG ZhenGuo ZHONG YangYin KANG Lin CHEN Jian YUAN Jie HATANO Takeshi WANG HuaBing & WU PeiHeng Research Institute of Superconductor Electronics Nanjing University Nanjing China National Institute for Materials Science Tsukuba Japan |
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| Affiliation: | JIANG ZhenGuo1,ZHONG YangYin1,KANG Lin1,CHEN Jian1,YUAN Jie2,HATANO Takeshi2,WANG HuaBing2 & WU PeiHeng1 1 Research Institute of Superconductor Electronics,Nanjing University,Nanjing 210093,China,2 National Institute for Materials Science,Tsukuba 3050047,Japan |
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| Abstract: | Although terahertz (THz) emission has been recently reported in high temperature superconductor Bi2Sr2CaCu2O8+x intrinsic Josephson junctions (IJJs), fabrication technique, especially the influence of argon ion milling, has yet to be further investigated. In this work, the fabrication process was systematically tested with silicon single crystals under various accelerating voltages and incident beam angles. The optimum conditions, under which silicon mesas can be fabricated with high etching rate, sharp ste... |
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| Keywords: | argon ion milling high temperature superconducting intrinsic Josephson junctions THz-emission |
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