新型纳米三坐标测量机结构的动态特性分析

主要分析了新型纳米三坐标测量机主体结构的动态特性，包括结构的振动特性以及结构的振动响应，其目的是为分析和评定纳米测量机的动态精度做准备．通过建立振动模型并利用ANSYS对此结构进行模态分析以及谐响应分析，从而得到此结构的固有频率、振型以及在纳米电机的激励下结构的位移、应力,同时对龙门式和拱形式测量机结构进行了动态分析与对比，从而证明了这种新型四面对称式桥架在保证纳米三坐标动态测量精度上的优越性．

Dynamic Analysis of a New Nano-CMM Structure

Dynamic analysis of a new Nano-CMM(Coordinate Measuring Machine with nanometer resolution) structure is introduced,including vibration characteristic analysis and vibration response analysis.The aim is to assess and analyze dynamic accuracy of structure.Modal and harmonic analysis were made by ANSYS software based on establishing equation of vibration,so as to achieve natural frequency and fundamental vibration mode of structure,and also the displacement and stress of structure under nanomotion motor driving.Moreover,the analysis and comparison of rectangular-bridge and arch-bridge are made in order to prove the superiority of dynamic accuracy of the symmetrical-bridge structure.