| 用偏振移相共路剪切干涉仪测量光学非球面 |
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| 引用本文： | 董文勇,王平. 用偏振移相共路剪切干涉仪测量光学非球面[J]. 北京工商大学学报(自然科学版), 2003, 21(3): 40-43 |
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| 作者姓名： | 董文勇 王平 |
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| 作者单位： | 北京理工大学,信息科学技术学院,北京,100081 |
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| 基金项目： | 北京市自然科学基金:“基于虚拟仪器的激光共路剪切干涉机理的非球面透镜检测研究” |
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| 摘 要： | 现代光学系统中大量使用了非球面元件,光学非球面表面面形精度要求高,一般不低于λ/4(λ=0.6832μm),使得加工与检测难度极高。本文介绍了一种用于测量光学非球面透镜的偏振移相剪切干涉方法和数据处理方法,该系统具有测量精度高、调整方便、测量速度快、操作简单、对外界干扰不敏感等特点。
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| 关 键 词： | 非球面 剪切干涉 偏振移相 |
| 文章编号： | 1671-1513(2003)03-0040-04 |
| 修稿时间： | 2002-10-16 |
TESTING OPTICAL ASPHERIC SURFACE BY POLARIZED PHASE-SHIFTED SHEARING INTERFEROMETE |
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| DONG Wen-yong,WANG Ping. TESTING OPTICAL ASPHERIC SURFACE BY POLARIZED PHASE-SHIFTED SHEARING INTERFEROMETE[J]. Journal of Beijing Technology and Business University:Natural Science Edition, 2003, 21(3): 40-43 |
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| Authors: | DONG Wen-yong WANG Ping |
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| Abstract: | Optical aspheric components are widely used in modern optical systems. High surface shape precision of optical aspheric surface is required. The precision is generally better than A/4 (A=0. 683 2 μm). It makes manufacture and testing of optical aspheric surface very difficult. Polarized phase-shifted shearing Interferometry and the method of data processing of it are presented in this paper. The testing system has several advantages; high precision, easy control, rapidity of testing, good anti-disturb and so on. |
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| Keywords: | aspheric surface shearing interf erometry phase-shifted |
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