| 真空蒸发法制备聚酯衬底ITO透明导电膜及其光电特性 |
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| 引用本文： | 马瑾,李淑英,马洪磊,叶丽娜.真空蒸发法制备聚酯衬底ITO透明导电膜及其光电特性[J].山东大学学报(理学版),1997(1). |
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| 作者姓名： | 马瑾 李淑英 马洪磊 叶丽娜 |
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| 作者单位： | 山东大学光电材料与器材研究所 |
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| 基金项目： | 山东省自然科学基金,山东大学青年基金 |
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| 摘 要： | 采用真空反应蒸发技术，在聚酯薄膜基片上制备出高质量的ＩＴＯ透明导电薄膜，对薄膜的结构和光电特性及制备条件对薄膜性能的影响进行了研究
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| 关 键 词： | ITO薄膜 透过率 方块电阻 |
STUDY ON PREPARATION AND OPTOELECTRICAL PROPERTIES OF ITO FILMS DEPOSTED ONTO POLYESTER SUBSTRATES BY EVAPRATING METHOD |
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| Ma Jin,Li Shuying,Ma Honglei,Ye Lina.STUDY ON PREPARATION AND OPTOELECTRICAL PROPERTIES OF ITO FILMS DEPOSTED ONTO POLYESTER SUBSTRATES BY EVAPRATING METHOD[J].Journal of Shandong University,1997(1). |
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| Authors: | Ma Jin Li Shuying Ma Honglei Ye Lina |
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| Abstract: | ITO films with high optical transmission and conduction were prepared by evaporating In Sn alloys onto the polyester substrates in oxygen.Structure and optoelectrical properties of the deposited films were investigated. |
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| Keywords: | ITO Films transmission sheet resistance |
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