| 动态集成电路的光声分层成像 |
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| 引用本文： | 方健文 张淑仪. 动态集成电路的光声分层成像[J]. 应用科学学报, 1995, 13(3): 352-358 |
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| 作者姓名： | 方健文 张淑仪 |
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| 作者单位： | 浙江师范大学，南京大学 |
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| 摘 要： | 利用压电光声技术，对处于工作状态的集成电路器件进行了光声分层成像。同时，在理论上研究了动态集成电路的光声分层成像机理，结果表明，动态器件的光声分层成像，不仅可以突出显示器件中某些一般不易观察到的亚表面结构，而且还可研究器件的工作原理以及分析器件动态失效的原因。显示了动态光声分层成像在半导体领域的应用前景。
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| 关 键 词： | 光声技术 分层成像 动态集成电路 集成电路 |
PHOTOACOUSTICLAYEREDIMAGING OF DYNAMIC INTEGRATED CIRCUTS |
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| FANG JIAN WEN. PHOTOACOUSTICLAYEREDIMAGING OF DYNAMIC INTEGRATED CIRCUTS[J]. Journal of Applied Sciences, 1995, 13(3): 352-358 |
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| Authors: | FANG JIAN WEN |
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| Affiliation: | FANG JIAN WEN(zhejiang Normal University)ZHANGSHUYI GHENGJIANCHUN ZHANGZHONGNING(Nanjing University) |
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| Abstract: | The depthprofiling of piezoelectric photoacoustic(PA)imaging of the dynamicintegrated circuis(IC)has been studied experimentally andtheoretically. A one-dimensional model is proposedtostudythe influence of the external DC electriCfield on the PA depth profiling and to explainthe experimental results. It is foundthat the PA layered imaging of dynamic IC devices can be used not onlyttostudythe subsurfaee features but alsotoanalyze the working principles and the failurefactors of the IC devices.Itis demonstrated that PA layered imaging of dynamicIC devices will have important application prospects. |
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| Keywords: | photoacoustic technique layered imaging dynamic integrated circuits. |
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