| 纵向结构真空磁敏传感器的原理和制造 |
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| 引用本文： | 陈春辉 杨根庆. 纵向结构真空磁敏传感器的原理和制造[J]. 华东师范大学学报(自然科学版), 1998, 0(4): 56-62 |
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| 作者姓名： | 陈春辉 杨根庆 |
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| 作者单位： | [1]华东师范大学电子科学技术系 [2]中科院上海冶金所传感技术国家重点实验室 |
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| 摘 要： | 该文介绍了用场发射阵列作为电子源的纵向磁敏感传感器的工作原理，分析了这种磁敏传感器的灵敏度，并阐述了ＶＦＥＡＭＦＳ器件的制造和结果以及器件的基本工作参数和提高灵敏度的主要措施。
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| 关 键 词： | 磁敏传感器 纵向结构 VFEAMFS 真空磁敏传感器 |
The Principle and Fabrication of Vertical Vacuum Magnetic Field Sensor |
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| Chen Chunhui, Fan Zhong, Liu Xinfu, Li Qiong, Xu Jingfang. The Principle and Fabrication of Vertical Vacuum Magnetic Field Sensor[J]. Journal of East China Normal University(Natural Science), 1998, 0(4): 56-62 |
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| Authors: | Chen Chunhui Fan Zhong Liu Xinfu Li Qiong Xu Jingfang |
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| Abstract: | This paper presented the primary operation principle of Vertical Field Emitter Arrays Magnetic Field Sensor (VFEAMFS), the analysis of its sensibility, the fabrication process and experimental results. The basic working parameters and the methods for improving the sensibility of VFEAMFS are achieved. The theoretical analysis and experimental results of the VFEAMFS show that it should have a good sensibility and applicability. |
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| Keywords: | field emitter array vertical vacuum magnetic field sensor |
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