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一种快速测定CVD金刚石膜磨耗比的方法
引用本文:蔡云虹,罗廷礼,张平伟,张瑞芹,崔文秀. 一种快速测定CVD金刚石膜磨耗比的方法[J]. 河北省科学院学报, 2006, 23(1): 50-53
作者姓名:蔡云虹  罗廷礼  张平伟  张瑞芹  崔文秀
作者单位:河北省激光研究所,河北,石家庄,050081;河北省激光研究所,河北,石家庄,050081;河北省激光研究所,河北,石家庄,050081;河北省激光研究所,河北,石家庄,050081;河北省激光研究所,河北,石家庄,050081
摘    要:报道了CVD金刚石膜磨耗比的一种简易快速测量方法.该方法通过测量金刚石膜被磨耗的体积来求得磨耗比.其优点是不使用微量分析天平,因而降低了对实验环境条件的要求,省去了烘干和称重两项工序,测试快速简便.通过与质量法对比,所得数据比较准确可信.

关 键 词:CVD金刚石膜  磨耗比
文章编号:1001-9383(2006)01-0050-04
修稿时间:2005-10-19

A quick method for measure grind ratio of CVD diamond film
CAI Yun-hong,LUO Ting-li,ZHANG Ping-wei,ZHANG Rui-qin,CUI Wen-xiu. A quick method for measure grind ratio of CVD diamond film[J]. Journal of The Hebei Academy of Sciences, 2006, 23(1): 50-53
Authors:CAI Yun-hong  LUO Ting-li  ZHANG Ping-wei  ZHANG Rui-qin  CUI Wen-xiu
Abstract:A quick and easy method for measure grind ratio is proposed in order to measure grind ratio against the grind volume of diamond film.It has advantages which lower limit on environment condition because of no using mi- crobalance and operate quickly and easily because of avoiding stove and weight.As compared with gravi metic method,the result show the date If this method is exact and reliable.
Keywords:CVD diamond film  Grind ratio volume measure
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