红外激光诱导Mn2（CO）10的热分解沉积动力学

KINETICS OF IR LASER INDUCED PYROLYTIC DEPOSITION FROM Mn_2(CO)_(10)

Using He-Ne laser monitor transmitance measure in-situ method,the kinetics of pyrolytic deposition from Mn_2(CO)_(10) induced with OW CO_2 laser is studied. The dependence of the deposition rate on the laser intesity power has been obtained, at a given temperature,the threshold power is 4 W. The deposition rate increases with laser intensity when the laser intensity power is within the region from 4 Wto 12 W and becomes a constant when P is bigger than 12 W.The apparent activation energy for pyrolytic deposition of Mn_2(CO)_(10) on quartz substrate is 26 kJ/mol. The effecct of the vapor of Mn_2(CO)_(10) and added gases (CO,O_2 and Ar) has also been studied, the result shows that the deposition rates decrease obviously with increasing the partial presures of added gases.