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硅臂加工误差对微靶装配精度的影响研究
引用本文:张之敬,于洋,金鑫,叶鑫,全旭松. 硅臂加工误差对微靶装配精度的影响研究[J]. 北京理工大学学报, 2015, 35(7): 687-690. DOI: 10.15918/j.tbit1001-0645.2015.07.006
作者姓名:张之敬  于洋  金鑫  叶鑫  全旭松
作者单位:北京理工大学机械与车辆学院,北京,100081;北京理工大学机械与车辆学院,北京,100081;北京理工大学机械与车辆学院,北京,100081;北京理工大学机械与车辆学院,北京,100081;北京理工大学机械与车辆学院,北京,100081
基金项目:国家自然科学基金资助项目(51375054;51127004)
摘    要:为预测加工误差对微靶装配精度的影响,开展了加工误差对硅臂刚度及应力分布的影响研究. 基于PRO/E逆向工程对实际加工的硅臂样品建模,并搭建实验平台,建立微力与微位移关系的数学模型. 采用仿真与实验相结合的方法,对硅臂存在加工误差与无加工误差的情况下的刚度进行对比,定量预测微靶的装配精度. 研究表明为提高装配精度,必须充分考虑装配力和形位误差形成的非线性误差和非均匀应力场的影响. 

关 键 词:硅臂  加工误差  装配精度
收稿时间:2013-10-22

Research on the Microbarn Assembly Accuracy Influenced by the Machining Errors of Silicon Arm
ZHANG Zhi-jing,YU Yang,JIN Xin,YE Xin and QUAN Xu-song. Research on the Microbarn Assembly Accuracy Influenced by the Machining Errors of Silicon Arm[J]. Journal of Beijing Institute of Technology(Natural Science Edition), 2015, 35(7): 687-690. DOI: 10.15918/j.tbit1001-0645.2015.07.006
Authors:ZHANG Zhi-jing  YU Yang  JIN Xin  YE Xin  QUAN Xu-song
Affiliation:School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
Abstract:To predict the influence of machining errors on ignition target assembly accuracy, the influence of machining errors on silicon arm's stiffness and the stress distribution was studied. Combined ANSYS with Pro/E reverse engineering, the processed sample of silicon arm was modeled and simulated. The mathematic model established the relation of micro-force to micro-displacement. Based on numeric simulation and experiment method, the stiffness and stress differences were compared on the silicon arm with machining errors and the design size, and the assembly accuracy was analyzed quantificationally. The results show that, the influence of the nonlinear errors and nonuniform stress distribution caused by the assembly force and form-position errors is significant to assembly accuracy.
Keywords:silicon arm  machining errors  assembly accuracy
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