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用标记 Xe~+ 及背散射分析研究 Nb 的阳极氧化机理
引用本文:白新德,甘东文,周放,尤引娟.用标记 Xe~+ 及背散射分析研究 Nb 的阳极氧化机理[J].清华大学学报(自然科学版),1997(6).
作者姓名:白新德  甘东文  周放  尤引娟
作者单位:清华大学材料科学与工程系
基金项目:国家教委资助,冶金部资助
摘    要:用离子注入不同深度Xe原子标记法和卢瑟福背散射分析技术、X射线谱、Auger电子谱法分析研究了Nb在质量分数w为5%柠檬酸铵溶液中阳极氧化成膜机制,计算了不同阳极氧化电压下离子迁移数。结果表明阳极氧化膜主要是由于Nb离子和O离子相向迁移,随着阳极氧化电压的升高,生成氧化膜的区域向外(溶液侧)迁移,氧化膜的成分是Nb2O5。

关 键 词:阳极氧化  示踪技术  核反应分析

Study on the mechanism of the anodization of niobium by using ion implanting Xe + markers and RBS analysis
Bai Xinde,Gan Dongwen,Zhou Fang,You Yinjuan.Study on the mechanism of the anodization of niobium by using ion implanting Xe + markers and RBS analysis[J].Journal of Tsinghua University(Science and Technology),1997(6).
Authors:Bai Xinde  Gan Dongwen  Zhou Fang  You Yinjuan
Institution:Bai Xinde,Gan Dongwen,Zhou Fang,You Yinjuan Department of Materials Science and Engineering,Tsinghua University,Beijing 100084
Abstract:The mechanism of anodic oxidation on niobium in the solution of aqueous ammonium citrate ( w =5%) was studied with the layers of ion implanted Xe atom markers in different depth and analysed by the methods of RBS, X ray and AES and the ions migration numbers under different anodic potentials were caculated. The main reason for the forming of oxide films is the migration of both metal cations and oxygen anions in contrary directions and the area in which the oxide film formed is nearer the sample surface, which is connected with the solution, with the higher anodic potential. The composition of the oxide film is Nb 2O 5.
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