光栅刻划机刻划系统光机电集成优化方法研究

针对大面积衍射光栅刻划机在宏观尺度下进行微纳加工的工作特点以及纳米级刻线检测困难的问题,提出了一种光机电集成优化方法.此方法采用计算傅里叶光学和弦振动理论进行光栅刻线误差分析,结合振动实验及光学测量进行验证,最后采用智能优化方法对刻划系统进行结构参数优化.虚拟样机仿真结果表明,刻划系统的振动幅度降低了30%,验证了该集成优化方法的有效性.

Research on Opto-Mechatronics Integration Optimization Method of the Scatch System of the Grating Ruling Machine

To address large diffraction grating ruling engines' characteristics of micro nano processing at the macroscopic scale and to solve the problem of nanometer scale detection, this paper proposed a method of opto-mechatronics integration optimization. Firstly, computational Fourier optics and the theory of string vibration were used in error analysis. Then, the analysis results were verified by vibration test and optical measurement. Finally, intelligent optimization methods were used to optimize structural parameters. The validity of the opto-mechatronics integration optimization has been verified by simulating a virtual prototype, which has shown that the vibration amplitude of the Scatch System has reduced by 30%.