| 小型氦气闭循环致冷机低温泵的研制 |
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| 引用本文： | 陈长琦.小型氦气闭循环致冷机低温泵的研制[J].合肥工业大学学报(自然科学版),1995(1). |
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| 作者姓名： | 陈长琦 |
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| 摘 要： | 文章详细地描述了小型氦气闭循环致冷机低温系（亦称现代温泵）的设计、最佳结构参数的选择和主要特征．其口径φ２５０ｍｍ，对Ｈ２的抽速系数高达０．２５．该泵主要应用于超高真空．
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| 关 键 词： | 低温泵 超高真空 抽气系数 |
DEVELOPMENT OF A CRYOPUMP USED WITHSMALL-SCALE HELIUM CLOSED-CYCLE REFRIGERATOR |
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| Cheng Changqi.DEVELOPMENT OF A CRYOPUMP USED WITHSMALL-SCALE HELIUM CLOSED-CYCLE REFRIGERATOR[J].Journal of Hefei University of Technology(Natural Science),1995(1). |
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| Authors: | Cheng Changqi |
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| Institution: | Cheng Changqi |
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| Abstract: | paper details the design,the seletion of optimal construction parameters andthe main character of a cryopump used with small-scale helium closed-cycle refrigerator.ItS aperture is 250mm in diameter. There is a high Pumping coefficient,eopctaliy up to 0.25 for H2.Thispump is develops and used in ultrahigh vacuun. |
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| Keywords: | cryopump ultrahigh vacuum pumping coefficient |
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