气相沉积TiC/TiN涂层的组织和性能的研究

本文对气相沉积法(CVD和PVD)获得的TiC/TiN涂层,通过金相显微镜和扫描电镜的观察,x射线相结构分析,以及硬度、结合力、开裂情况的测定与分析,弄清了涂层的显微组织和相结构,提出了涂层的形成机制。测定结果表明,涂层与基体间的结合力,在高速钢基体上由PVD法沉积的TiN涂层约为7.09kgf/mm~2,在T10钢基体上由CVD法沉积的TiC涂层约为93.82kgf/mm~2。还探讨了涂层的断裂机制,讨论了涂层组织与性能之间的关系。本文的上述研究,为稳定、高效制备优质TiC/TiN涂层提供了依据。

THE STUDY OF THE STRUCTURES AND THE PROPERTIES OF THE TIC/TIN COATINGS DEPOSITED BY PVD AND CVD METHOD

By using the light microscope and SEM the surface morphology of the CVD and PVD TiC/TiN coating which is deposited on the steel substrate is studied. The phase constituent of the coatings is analysed by X ray diffraction method. At the same time the hardness and the cohesive strength between the coating and substrate are also measured. Through the above works the ideals of the microstructures and the phase constituents of the TiC/TiN coatings have been gained clearly. The formation mechanism of the coating layer has been suggested, too. The cohesive strength between the coating layer which is deposited by PVD method, and the substrate made by high speed is about 7.09kgf/mm~2. However the cohesive strength between the CVD TiC coating and the high carbon steel(T10) is about 93.82kgf/mm~2. In addition the fracture mechanism and the relationship between the microstructure and properties of the coatings are also discussed in the paper. On the bases of the result of the discussion a high quality TiC/TiN coating may be accomplished.