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A combinatorial approach of developing alloy thin films using co-sputtering technique for displays |
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| Authors: | Jaydeep SARKAR Tien-Heng HUANG Lih-Ping WANG Peter HMcDONALD Chi-Fung LO & Paul SGILMAN Praxair Electronics Route Orangeburg NY USA Materials Chemical Research Laboratories Photovoltaic Technology Center Industrial Technology Research Institute Hsinchu China |
| Abstract: | |
| Keywords: | co-sputtering thin films aluminum alloys displays |
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