| High-throughput synthesis of oxidation-resistant Nb–Si based alloy thin film by magnetron co-sputtering |
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| 作者姓名： | Chen Sun Wei Jiang Meifeng Li Jiangbo Sha Chungen Zhou |
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| 作者单位： | 1. State Power Investment Corporation Research Institute;2. GRIMAT Engineering Institute Co., Ltd.;3. General Research Institute for Nonferrous Metals;4. Key Laboratory of Aerospace Materials and Performance (Ministry of Education), School of Materials Science and Engineering, Beijing University of Aeronautics and Astronautics |
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| 基金项目： | supported by National Key R&D Program of China (2017YFB0702903)；;the National Natural Science Foundation of China under the contract of 51431003；;the Joint Funds of the National Natural Science Foundation of China (U1435201)； |
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| 摘 要： | A high-throughput method was applied to study oxidation behavior of Nb-Si based alloy using composition spread alloy film as combinatorial libraries.An extended range of composition gradients of Nb-Si based alloy film was deposited by(multi)magnetron co-sputtering.The as-deposited film was composed of amorphous phase.Cr2 Nb,Nb5 Si3 and Nbss could be detected after annealing treatment.After oxidation at 1250℃ for 10 min and 20 min,the film composition space was di...
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| 收稿时间： | 2020-09-04 |
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