| X射线衍射对离子束混合形成硅化物品粒度的研究 |
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| 引用本文： | 丁维清,黄致新,马辉.X射线衍射对离子束混合形成硅化物品粒度的研究[J].北京师范大学学报(自然科学版),1989(4). |
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| 作者姓名： | 丁维清 黄致新 马辉 |
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| 作者单位： | 北京师范大学测试中心，北京师范大学低能核物理研究所，北京师范大学测试中心 |
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| 摘 要： | 用X衍射测定了离子束混合所形成铂硅化物的衍射线宽,并计算出了其晶粒大小.发现混合时的注入剂量和后退火温度都会影响其晶粒大小.
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| 关 键 词： | 衍射线宽 离子束混合 品粒度 硅化物 |
X-RAY DIFFRACTION STUDIES ON THE GRAIN-SIZE OF SILICIED FORMED BY ION BEAM MIXING |
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| Ding Weiqing Huang Zhixin Ma Hui.X-RAY DIFFRACTION STUDIES ON THE GRAIN-SIZE OF SILICIED FORMED BY ION BEAM MIXING[J].Journal of Beijing Normal University(Natural Science),1989(4). |
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| Authors: | Ding Weiqing Huang Zhixin Ma Hui |
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| Institution: | Analytical and Testing Ccntcr; Institute of Low Energy Nuclear Physics |
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| Abstract: | By using the X-ray diffraction, the line width of the platinum silicide formed by ion beam mixing is investigated and its grain-size is calculated. It is found that both the dose of ion beam mixing and the postannealing temperature can influence the grain-size. |
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| Keywords: | line width ion beam mixing grain-size silicide |
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