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真空蒸发法制备CdS薄膜及其性能研究
引用本文:单玉桥,党鹏,于晓中,单连中.真空蒸发法制备CdS薄膜及其性能研究[J].东北大学学报(自然科学版),2009,30(3):392-395.
作者姓名:单玉桥  党鹏  于晓中  单连中
作者单位:东北大学材料各向异性与织构工程教育部重点实验室,辽宁沈阳,110004
摘    要:用真空蒸发法制备了CdS薄膜,用扫描电镜、X射线衍射仪、紫外-可见光分光光度计、四探针对薄膜的形貌、结构、光电性能进行分析测试.研究结果表明,不同基片温度下所制备的CdS薄膜主要为六方相,CdS薄膜在(002)晶面有高度的择优取向;不同基片温度下的薄膜对可见光的透光率都超过70%;薄膜的电阻率随基片温度的升高而增大;基片温度为50℃时薄膜的Eg为2.41 eV;在200℃退火处理改善了CdS薄膜的质量,结晶度提高,电阻率降低,晶粒尺寸增大;基片温度为50℃时薄膜在200℃退火后的电阻率为255Ω.cm.

关 键 词:CdS  太阳电池  薄膜  真空蒸发  

Preparation of CdS Thin Films by Vacuum Evaporation and Their Properties
SHAN Yu-qiao,DANG Peng,YU Xiao-zhong,SHAN Lian-zhong.Preparation of CdS Thin Films by Vacuum Evaporation and Their Properties[J].Journal of Northeastern University(Natural Science),2009,30(3):392-395.
Authors:SHAN Yu-qiao  DANG Peng  YU Xiao-zhong  SHAN Lian-zhong
Institution:SHAN Yu-qiao,DANG Peng,YU Xiao-zhong,SHAN Lian-zhong(Key Laboratory for Anisotropy , Texture of Materials(Ministry of Education),Northeastern University,Shenyang 110004,China.)
Abstract:CdS thin film was prepared by vacuum evaporation and its surface morphology,structure and photoelectric properties were tested and analyzed with scanning electron microscopy(SEM),X-ray diffraction(XRD),UV-visible spectroscopy and four-point probe method.The results showed that the CdS thin films deposited on the substrates at different temperatures are mainly of hexagonal phase with the crystal planes(002) in highly preferred orientation.The visible light transmittances of the films deposited on the substra...
Keywords:CdS
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