| 低能量PLD方法沉积的a—C薄膜结构及光学性能研究 |
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| 引用本文： | 杨益民,郭建,王金斌,杨国伟. 低能量PLD方法沉积的a—C薄膜结构及光学性能研究[J]. 湘潭大学自然科学学报, 2001, 23(2): 42-46 |
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| 作者姓名： | 杨益民 郭建 王金斌 杨国伟 |
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| 作者单位： | 湘潭大学物理系, |
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| 基金项目： | 湖南省教委基金资助项目(98B004) |
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| 摘 要： | 用低能量脉冲激光沉积（PLD）方法在单晶硅片、石英玻璃片、载玻片等基底材料上分别沉积了一层碳膜、X射线衍射谱膜为非晶态，喇曼散射实验表明膜无明显类金刚石特征，紫外－可见分光光度计测试结果表明：膜在紫外、可见光区折射率低于石英、玻璃等材料，红外透过率谱显示膜在红外区有宽范围，显著增透作用。
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| 关 键 词： | 脉冲激光沉积 a－C薄膜 PLD方法 DLC膜 类金刚石碳膜 薄膜结构 光学性能 |
| 文章编号： | 1000-5900(2001)02-0042-05 |
| 修稿时间： | 2000-10-12 |
Study on the Optical Properties of Amorphous Carbon FilmsDeposited by Low-energy Pulsed Laser |
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| YANG Yi-min,GUO Jian,WANG Jin-bing,YANG Guo-wei. Study on the Optical Properties of Amorphous Carbon FilmsDeposited by Low-energy Pulsed Laser[J]. Natural Science Journal of Xiangtan University, 2001, 23(2): 42-46 |
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| Authors: | YANG Yi-min GUO Jian WANG Jin-bing YANG Guo-wei |
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| Abstract: | Carbon films were deposited by low-energy pulsed laser on single cystal silicon chips with sur-face vertical to a-axis, quartz chip and glass respectively. The films were amorphous and no diamond-like character was observed, as confirmed by X-ray diffraction and Raman spectroscopy respectively. Spectrophotometry proved that the films had lower refractive indices than that of quartz or glass for UV-visible light. The spectra of infrared transmittance showed that the films had widely and strongly transmittance-increasing function. |
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| Keywords: | pulsed laser deposity a-C |
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