| 一种小量程应变式压力传感器结构设计 |
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| 引用本文： | 李俊国. 一种小量程应变式压力传感器结构设计[J]. 西南科技大学学报, 2006, 21(2): 63-65 |
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| 作者姓名： | 李俊国 |
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| 作者单位： | 西南科技大学信息工程学院,四川,绵阳,621010 |
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| 摘 要： | 提出了一种新型的梁膜结构,其体积较小、应力集中效应明显,特别适合作小量程应变式压力传感器。通过有限元分析发现,当膜片厚度与梁厚度为某一比值时,膜片中心应力值最大,而位移量较小,即传感器灵敏度较大,而非线性较小。设计的传感器样品的灵敏度达0.5 mV/V,总精度优于0.1%F.S。
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| 关 键 词： | 应力 量程压力传感器 有限元分析 |
| 文章编号： | 1671-8755(2006)02-0063-03 |
| 收稿时间： | 2005-12-27 |
| 修稿时间： | 2005-12-27 |
Design on Structure of Low Scale Pressure Sensor of Strain Type |
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| LI Jun-guo. Design on Structure of Low Scale Pressure Sensor of Strain Type[J]. Journal of Southwest University of Science and Technology, 2006, 21(2): 63-65 |
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| Authors: | LI Jun-guo |
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| Affiliation: | School of Information Science and Technology, Southwest University of Science and Technology, Mianyang 621010, Sichuan, China |
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| Abstract: | A novel beam-membrane structure was proposed,with a small size and obvious effect of centralizing stress,especially fitting low scale pressure sensor of strain type.Finite Element Analysis shows that there exists a thickness ratio between the membrane and the beam that the stress at the centre of the membrane reaches its maximum at a small displacement,hence the sensor is highly sensitive with a small non-linearity.The sensitivity of the sample sensor designed is 0.5mV/V,and its whole precision exceeds 0.1% F.S. |
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| Keywords: | stress scale pressure sensor Finite Element Analysis |
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