多孔AAO模板合成低维有序纳米结构阵列研究进展

多孔阳极氧化铝模板具有好的有序性、成本低、耐高温、大面积可控、孔洞分布均匀、及大小可控等优点，是合成高度有序纳米材料的理想模板。本文综述了阳极氧化铝模板的制备和以此为模板采用常规方法，如脉冲激光沉积技术、离子束刻蚀、金属辅助化学蚀刻技术、化学气相沉积技术等制备低维垂直有序纳米阵列的最新研究进展，并指出了其目前存在的问题。

Research Progress of Ordered Nanostructure Arrays on Low-dimensional Fabrication Using Porous Anodic Aluminum Oxide Template

Porous anodic alumina membrane is an ideal template for highly ordered nanomaterials because its good ordering, high temperature resistance, low cost, uniform pore arrays, and controllable pore size. The preparation of porous anodic aluminum oxide template and the latest research progress in the fabrication of various vertical ordered nanostructure arrays with some typical methods including Pulsed Laser Deposition、Ion Beam Etching、metal-assisted chemical etching、chemical vapor deposition, Sol-gel are reviewed. The primary difficulties in research were also pointed out.