MOCVD制备Mo2C膜成膜机理

对ＭＯＣＶＤ制备Ｍｏ２Ｃ膜的物理化学机理进行理论探讨。根据实验结果论证了ＭＯＣＶＤ制备Ｍｏ２Ｃ膜过程中，Ｍｏ（ＣＯ）６遵从先被基底吸附、发生相变再进行分解的两步机制；Ｍｏ（ＣＯ）６的分解过程是级联式分解，最后由Ｍｏ碳化为Ｍｏ２Ｃ膜；利用Ｇｉｂｂｓ函数最小的原理，对ＭＯＣＶＤ沉积Ｍｏ２以ＩＰ ＲＣ ＹＩＤ Ｒ ＦＫＦ ＤＭＨ ＡＤＷＲＢＩＢ ＯＶＴ ＦＪＴＦＹＦＴＨ，ＲＰＷＳＶＦ Ｂ ＤＮ ＥＡＪＤ

Research on Mechanism of the MOCVD Preparation of Mo_2C Film

The paper intends to go theoretically into the mechanism of physical chemistry of the preparation of Mo 2C film by using MOCVD.It has proved,by the result of experiment,in the process of the preparation of Mo 2C,that the two-step mechanism which Mo(CO) 6 should follow:firstly,Mo(CO) 6 is absorbed by the fundamental bottom and does a phase change;and secondly,it is decomposed.the process of decomposition of Mo(CO) 6 is a sequential one,which is finally carbonized into Mo 2C film from Mo.By applying Gibbs functional smallness principle to the calculation of Gibbs function of chemistry reaction in MOCVD when it deposits Mo 2C film,the best temperature of preparing film is probed.