| PET基纳米ZnO膜的溅射沉积及AFM表征 |
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| 引用本文： | 李良飞,侯大寅,魏取福.PET基纳米ZnO膜的溅射沉积及AFM表征[J].安徽工程科技学院学报,2006,21(3):42-45. |
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| 作者姓名： | 李良飞 侯大寅 魏取福 |
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| 作者单位： | 1. 安徽工程科技学院,安徽省纺织面料重点实验室,安徽,芜湖,241000
2. 江南大学,生态纺织教育部重点实验室,江苏,无锡,214122 |
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| 基金项目： | 教育部科学技术研究重点项目 |
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| 摘 要： | 在纺织材料表面进行ZnO镀层处理,能赋予聚合物纤维表面以特殊的光电功能.利用磁控溅射法在PET非织造布表面制备出颗粒均匀、细致、稳定的纳米ZnO薄膜.利用原子力显微镜(AFM)对不同参数下制备的ZnO薄膜表面形貌进行表征,分析了不同溅射加工条件对ZnO薄膜表面形态的影响.
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| 关 键 词： | 纳米ZnO 磁控溅射 原子力显微镜 |
| 文章编号： | 1672-2477(2006)03-0042-04 |
| 收稿时间： | 03 28 2006 12:00AM |
| 修稿时间： | 2006年3月28日 |
Sputtering ZnO nano films on PET substrate and the surface characterization by AFM |
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| LI Liang-fei,HOU Da-yin,WEI Qu-fu.Sputtering ZnO nano films on PET substrate and the surface characterization by AFM[J].Journal of Anhui University of Technology and Science,2006,21(3):42-45. |
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| Authors: | LI Liang-fei HOU Da-yin WEI Qu-fu |
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| Abstract: | The polymer fibers have photoelectricity particularly by plating ZnO films on the surface of textile materials.Nano ZnO thin films were prepared by magnetron sputtering on the Polyethylene Terephthalate(PET) nonwoven fabric substrates.The nano-ZnO grains were uniform and stably prepared by magnetron sputtering.The surface topography of the ZnO thin film was observed by the Atom Force Microscopy(AFM) under the different technical parameters,analyzing the influence of the surface shape of ZnO which was prepared under different sputter parameters.The paper searches for a new method of the surface functional finishing of the textile materials. |
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| Keywords: | nano-ZnO magnetron sputtering Atom Force Microscope |
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