非晶CoZrNb磁性薄膜的研究

研究溅射条件和旋转磁场热处理对CoZrNb薄膜结构和性能的影响。结果表明，高的溅射功率和合适的氩气压强对非晶CoZrNb薄膜的形成有用，并且这些薄膜的矫顽力较小。旋转磁场热处理将改善薄膜的软磁性能，使得矫顽力进一步减小。对溅射条件对薄膜性能的影响机制和旋转磁场热处理改善薄膜性能的机制作了简要的讨论。

The Study of Amorphous CoZrNb Magnetic Thin Films

Amorphous CoZrNb thin films,as superior head materials for high density magnetic recording,have been gaining great atten- tion due to their excellent soft magnetic properties.This paper is focusing on field armealing(RMA)on the structure and magnetic proper- ties of CoZxNb thin films.Also,the mechanism of RMA improving the magnetic properties is generally discussed.Experimental results show that the amorphous owe its formation to the high incident power and suitable pressure of argon;the obtained thin film samples show satisfactory soft magnetic properties with low coercivities.Simultaneously,experimental results also show that RAM can improve the soft magnetic properties of CoZrNb thin filmg,by lowering the coereivities.The above results are discussed and explained in this paper. Through these investigation,the optimum preparing conditions of amorphous CoZrNb thin films have been found.