| 化学法镀膜的过程控制研究 |
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| 引用本文： | 王珊.化学法镀膜的过程控制研究[J].科技资讯,2009(33):92-93. |
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| 作者姓名： | 王珊 |
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| 作者单位： | 上海工程技术大学基础教学学院,上海,200336 |
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| 摘 要： | 溶胶-凝胶法制备的光学薄膜具有优良的物理化学特性和广阔的应用前景。本文对化学法镀膜中的溶胶制备﹑溶胶保存﹑薄膜制备三个阶段进行了研究,利用透射电镜﹑激光粒度仪﹑红外光谱仪﹑原子力显微镜﹑椭偏仪等仪器对溶胶和薄膜的特性进行检测,对其进行过程控制,其结果对于制备出性能良好的薄膜材料及其产业化应用具有一定的指导意义。
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| 关 键 词： | 溶胶凝胶 镀膜 过程控制 |
Study of Process Control on Sol-gel derived optical thin films |
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| WANG Shan.Study of Process Control on Sol-gel derived optical thin films[J].Science & Technology Information,2009(33):92-93. |
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| Authors: | WANG Shan |
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| Institution: | WANG Shan (College of Fundamental Studies, Shanghai University of Engineering Science, Shanghai 200336, China) |
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| Abstract: | Sol-gel derived optical thin films had good physics and chemical characters and wide applications.The three steps, Sol prepared, Sol preserved and Film made were studied in this paper.Sol and thin films were characterized by TEM, LPSA, FTIR, AFM,ellipsometer respectively.The results will be useful in the industrialization of the perfect film material. |
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| Keywords: | Sol-Gel Process Coating Process Control |
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