| 铂掺杂对氧化锡超微粒子薄膜表面结构及气敏特性的影响 |
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| 引用本文： | 杨青,章壮健.铂掺杂对氧化锡超微粒子薄膜表面结构及气敏特性的影响[J].华东理工大学学报(自然科学版),1994,20(2):228-232. |
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| 作者姓名： | 杨青 章壮健 |
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| 作者单位： | 华东理工大学物理系，复旦大学材料科学系 |
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| 摘 要： | 用直流气体放电活化反应蒸发法制备了氧化锡超微粒子薄膜（Ｉ），再用直流平面磁控溅射法掺杂Ｐｔ。Ｐｔ的掺入使Ｉ的晶粒增多，电导下降，还使薄膜的气敏特性到显著改善，讨论了Ｐｔ掺杂对薄膜灵敏度影响的机理。
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| 关 键 词： | 氧化锡 超微粒子 薄膜 气敏特性 |
Influence of Pt Dopping on the Surface Structure and on theGas-Sensing Characteristics of Tin Oxide Ultrafine Particle Films |
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| Yang Qing,Pan Xiaoren,Shi Shanding.Influence of Pt Dopping on the Surface Structure and on theGas-Sensing Characteristics of Tin Oxide Ultrafine Particle Films[J].Journal of East China University of Science and Technology,1994,20(2):228-232. |
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| Authors: | Yang Qing Pan Xiaoren Shi Shanding |
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| Abstract: | The Tin oxide ultrafine particle films were deposited by D. C. gas dischargeactivating reactive evaporation. The deposited films were dopped with platinum by magnetronSputtering.The surface structure and composition of the prepared films have been inves-tigated by AES and XRD. The electrical pxoperties and the effect of Pt addition on gas-sensingcharacteristics as well as its mechanisms have also been investigated. |
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| Keywords: | tin oxide:ultrafine particle:thin film:gassensing characteristics:surface |
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