| 离子注入介质中输运的数值模拟 |
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| 引用本文： | 郑冬琴 黄祖湛. 离子注入介质中输运的数值模拟[J]. 暨南大学学报(自然科学与医学版), 1999, 20(5): 11-16 |
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| 作者姓名： | 郑冬琴 黄祖湛 |
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| 作者单位： | 暨南大学物理系!广东广州510632 |
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| 摘 要： | 讨论了离子注入在人质中输运的数值模拟方法，采用扩散理论和交替方向隐式的Ｄ－Ｒ差分法，以砷离子注入在硅单晶中输运为例，数值模拟结果与实验结果基本相符。
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| 关 键 词： | 离子注入 扩散理论 交替方向隐式法 硅单晶 |
Numerical simulation of the ion implantation in maters transport |
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| ZHANG Chun-lin,ZHENG Dong-qin,HUANG Zu-zhan,YANG Li-wen. Numerical simulation of the ion implantation in maters transport[J]. Journal of Jinan University(Natural Science & Medicine Edition), 1999, 20(5): 11-16 |
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| Authors: | ZHANG Chun-lin ZHENG Dong-qin HUANG Zu-zhan YANG Li-wen |
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| Abstract: | The numerical simulation method of the ion implantation in matters transport, using diffusion theory and Douglas-Rachford diffusion method of Alternation Direction Implicit is discussed. As an example, the Transposition of the Arsenic ion implantation into the silicon Single Crystal is studied.The research shows that the results of numerical analysis is successful. |
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| Keywords: | ion implantation diffusion theory alternating direction implicit method |
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