| 新型微流通池pH-ISFET集成传感器的研制 |
| |
| 引用本文： | 牛蒙年,丁辛芳.新型微流通池pH-ISFET集成传感器的研制[J].应用科学学报,1997,15(1):75-81. |
| |
| 作者姓名： | 牛蒙年 丁辛芳 |
| |
| 作者单位： | 东南大学 |
| |
| 摘 要： | 报道了一种新型微流通池pE-ISFET集成传感器,该集成传感器采用常规IC工艺、微加工技术和键合技术,实现微流通池、四对长臂式ISFET/REFET传感器(差分测量用)和Ti/Au膜伪参考电极芯片一体化结构,芯片面积为8mm×6mm,微流通池体积为0.7mm×5.0mm×0.3mm,当集成传感器外部配上蠕动泵、注入阀和测量电路则构成微流通池pH-ISFET流动注入分析(FIA)系统。实验结果表明,该集成传感器和FIA系统具有响应快、耗样液量少等特点,且稳定性和可靠性大为提高。
|
| 关 键 词： | Ti/Au 伪参考电极 结构FIA系统 辙流通池 pH-ISFET 集成传感器 ISFET/REFET |
| 收稿时间： | 1995-03-22 |
| 修稿时间： | 1995-09-15 |
DEVELOPMENT OF A NOVEL MICRO FLOW-THROUGHCELL Ph-ISFET INTEGRATED SENSOR |
| |
| NIU NENGNIAN DING XINFNG.DEVELOPMENT OF A NOVEL MICRO FLOW-THROUGHCELL Ph-ISFET INTEGRATED SENSOR[J].Journal of Applied Sciences,1997,15(1):75-81. |
| |
| Authors: | NIU NENGNIAN DING XINFNG |
| |
| Institution: | Southeast University, Microelectronics Center, Nanjing 210096 |
| |
| Abstract: | Based on the normal IC process, micro machining technology and bonding technology, a novel micro flow-through cell pH-ISFET integrated sensor has been developed, which comprises micro flowthrough cell, four pair long-armed ISFET/REFET sensor (differential measurement) and Ti/Au film pseudo-reference electrode. The chip area and micro flow-through cell's Volumeare 8×6mm2 and 0.7×5.0×0.3mm3, respectively. The integrated sensor together with extra peristaltic pump, injection valve and measurement circuits consists of micro flow-through cell pH-ISFET FIA (flow-injection analysis) system,Experimental results show that the integrated sensor and FIA system have fast response, small sample consumption, and other features and its stability and reliability are also ameliorated. |
| |
| Keywords: | pH-ISFET integrated sensor micro flow-through cell Ti/Au filmpseudo-reference electrode ISFET/REFET structure FIA system |
| 本文献已被 CNKI 等数据库收录！ |
| 点击此处可从《应用科学学报》浏览原始摘要信息 |
| 点击此处可从《应用科学学报》下载免费的PDF全文 |
|
